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A -- Fabrication of MEMS for Sensor System Development

Solicitation Number: N66001-10-R-0064
Agency: Department of the Navy
Office: Space and Naval Warfare Systems Command
Location: SPAWAR Systems Center Pacific
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Added: Sep 28, 2010 5:22 pm
SPAWAR Systems Center Pacific (SPAWAR SSC Pacific) intends to negotiate asole-source, indefinite-delivery/indefinite-quantity contract with Smart SystemTechnology & Commercialization Center (formerly Infotonics TechnologyCenter, Inc.), Canandaigua, NY, to perform fabrication of Micro-Electro-Mechanical Systems (MEMS) for Sensor System Development.

This contract will provide MEMS fabrication and diagnostic support services insupport of various sensors and systems for the warfighter. It is required thatthe contractor provide the facilities equipment, starting wafer material, andmasks necessary to fabricate the devices as tasked by the Government.

The contractor must be able to handle wafer sizes of 150 mm in diameter. Inaddition, the foundry must have the following capabilities:

- DRIE capability to 500um- Thermal Oxidation capability- Nitride deposition capability- Polysilicon deposition capability- Ion Implant Anneal- Au eutectic or Au Compression wafer bonding- KOH or TMAH Etching- Multiple wafer bonding (3 or more wafers)- Dual Alignment Capability front and back side- Ability to process on the front side and back side

The Government will task the contractor to perform a combination of researchand development and prototyping services that will provide for the design,development, and fabrication of 1) Intelligence, Surveillance andReconnaissance (ISR) sensors; 2) Inertial sensor components; 3) Acousticsensor components; 4) Energy Harvesting components; 5) Opto-Electro-Mechanical systems; and 6) Resistive Heaters. NOTE: the list above is only asubset of technical areas that may be required from the Statement of Work.

The fabrication and assembly/packaging must be performed in-house with theexception of certain commercially available steps such as implants and/or thefabrication of pre-engineered substrates. In addition, highly specificdiagnosticsteps may also be subcontracted under certain circumstances. However, allexceptions to performing the tasking in-house will require prior approval bytheGovernment.

Authority for other than full and open competition is 10 U.S.C. 2304 (c)(1) andFAR 6.302-1, Only one responsible source and no other supplies or services willsatisfy agency requirements.

The proposed contract action is for services for which the Government intendsto solicit and negotiate with this authority. Interested persons may identifytheirinterest and capability to respond to the requirement or submit proposals. Thisnotice of intent is not a request for competitive proposals. However, allproposals received within fifteen days after date of publication of thissynopsiswill be considered by the government. A determination by the Government notto compete this proposed contract based upon responses to this notice is solelywithin the discretion of the government. Information received will normally beconsidered solely for the purpose of determining whether to conduct acompetitive procurement.

The applicable North American Industry Classification System (NAICS) Code is334413. The size standard is 500 employees. The anticipated period ofperformance will be approximately five years from the date of award comprisedof a one-year base with four 12-month options. The maximum estimated valueof the effort is $3,000,000. Pricing will be combination of Firm Fixed Price(FFP)and Cost Reimbursement type line items. Questions concerning this solesource contract action may be directed to Spencer M. Sessions Questions and/or responses are due by 13October 2010.
53560 Hull Street Bldg A33 Rm 1602W, San Diego CA 92152-5001
Point of Contact - Spencer M Sessions, Contract Specialist, 619-553-4523; Patrick J Donnelly, Contracting Officer, 619-553-7515

Contract Specialist